Photoluminescence and Raman spectroscopy in hydrogenated carbon films

Author

Marchon, Bruno ; Gui, Jing ; Grannen, Kevin ; Rauch, Gary C. ; Ager, Joel W., III ; Silva, S.R.P. ; Robertson, John

Author_Institution

Seagate Recording Media Group, Fremont, CA, USA

Volume

33

Issue

5

fYear

1997

fDate

9/1/1997 12:00:00 AM

Firstpage

3148

Lastpage

3150

Abstract

a-C:H films prepared by DC-magnetron sputtering in an H₂:Ar mixture exhibit strong photoluminescence (PL) peaks superimposed upon the Raman scattering spectrum. PL becomes observable at a hydrogen content of ca. 34%, and increases exponentially thereafter, driven by the progressive saturation of carbon dangling bonds. In this %H range, hardness and elastic modulus decrease and CSS durability reaches an optimum. The Raman G peak position is very sensitive to deposition temperature (shift of 0.1 cm^-1/°C) and was found to correlate with the sp³/sp² bonding ratio as measured by EELS, and therefore can also be used as a predictor of carbon tribological performance

Keywords

Raman spectra; carbon; dangling bonds; elastic moduli; electron energy loss spectra; hardness; hydrogen; magnetic recording; photoluminescence; sputtered coatings; wear resistant coatings; C:H; CSS durability; DC magnetron sputtering; EELS; Raman spectroscopy; dangling bonds; elastic modulus; hardness; hydrogenated amorphous carbon film; photoluminescence; tribological properties; Argon; Bonding; Cascading style sheets; Hydrogen; Photoluminescence; Position measurement; Raman scattering; Spectroscopy; Sputtering; Temperature sensors;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/20.617873

Filename

617873