Title :
Photoluminescence and Raman spectroscopy in hydrogenated carbon films
Author :
Marchon, Bruno ; Gui, Jing ; Grannen, Kevin ; Rauch, Gary C. ; Ager, Joel W., III ; Silva, S.R.P. ; Robertson, John
Author_Institution :
Seagate Recording Media Group, Fremont, CA, USA
fDate :
9/1/1997 12:00:00 AM
Abstract :
a-C:H films prepared by DC-magnetron sputtering in an H2:Ar mixture exhibit strong photoluminescence (PL) peaks superimposed upon the Raman scattering spectrum. PL becomes observable at a hydrogen content of ca. 34%, and increases exponentially thereafter, driven by the progressive saturation of carbon dangling bonds. In this %H range, hardness and elastic modulus decrease and CSS durability reaches an optimum. The Raman G peak position is very sensitive to deposition temperature (shift of 0.1 cm-1/°C) and was found to correlate with the sp3 /sp2 bonding ratio as measured by EELS, and therefore can also be used as a predictor of carbon tribological performance
Keywords :
Raman spectra; carbon; dangling bonds; elastic moduli; electron energy loss spectra; hardness; hydrogen; magnetic recording; photoluminescence; sputtered coatings; wear resistant coatings; C:H; CSS durability; DC magnetron sputtering; EELS; Raman spectroscopy; dangling bonds; elastic modulus; hardness; hydrogenated amorphous carbon film; photoluminescence; tribological properties; Argon; Bonding; Cascading style sheets; Hydrogen; Photoluminescence; Position measurement; Raman scattering; Spectroscopy; Sputtering; Temperature sensors;
Journal_Title :
Magnetics, IEEE Transactions on
