• DocumentCode
    1485702
  • Title

    Generalised Butterworth-Van Dyke equivalent circuit for thin-film bulk acoustic resonator

  • Author

    Jin, Hye-Jin ; Dong, S.R. ; Luo, Jack K. ; Milne, W.I.

  • Author_Institution
    Dept. of Inf. Sci. & Electron. Eng., Zhejiang Univ., Hangzhou, China
  • Volume
    47
  • Issue
    7
  • fYear
    2011
  • Firstpage
    424
  • Lastpage
    426
  • Abstract
    A generalised Butterworth-Van Dyke (GBVD) equivalent circuit model for a thin-film bulk acoustic resonator (FBAR), especially for a FBAR with a high electromechanical coupling constant (kt2), is presented. The derivation starts from the ideal impedance formula for the FBAR, then acoustic loss, dielectric loss, and electrode electrical loss are introduced step by step. Results show that the widely used modified Butterworth-Van Dyke (MBVD) model is a special case of a GBVD model using a low kt2 approximation.
  • Keywords
    acoustic resonators; bulk acoustic wave devices; dielectric losses; equivalent circuits; thin film devices; acoustic loss; dielectric loss; electrode electrical loss; electromechanical coupling constant; generalised Butterworth-Van Dyke equivalent circuit; thin-film bulk acoustic resonator;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el.2011.0343
  • Filename
    5741018
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1485702