DocumentCode
1485884
Title
Enhanced perpendicular coercive force of CoCr film formed on a very thin initial sublayer
Author
Hirono, Shigeru ; Furuya, Akinori
Author_Institution
Appl. Electron. Lab., NTT, Ibaraki, Japan
Volume
24
Issue
6
fYear
1988
fDate
11/1/1988 12:00:00 AM
Firstpage
2350
Lastpage
2352
Abstract
Perpendicular coercivity of CoCr sputtered films on Ti adhesive layers decreases drastically as RF sputtering power increases. A very thin CoCr sublayer deposited at low power enhances the coercivity of the succeeding CoCr layer. Magnetic properties and segregated microstructures show that the initial segregated microstructure is inherited by the main CoCr layer even though the RF sputtering power changes during the sputtering process. Its segregated microstructure is enhanced by the initial 100-Å segregated structure
Keywords
chromium alloys; cobalt alloys; coercive force; crystal microstructure; magnetic thin films; sputtered coatings; 100 A; CoCr film; RF sputtering power; Ti adhesive layers; initial sublayer; perpendicular coercive force; segregated microstructures; segregated structure; sputtering process; Coercive force; Magnetic anisotropy; Magnetic films; Magnetic properties; Microstructure; Perpendicular magnetic anisotropy; Radio frequency; Saturation magnetization; Sputtering; Substrates;
fLanguage
English
Journal_Title
Magnetics, IEEE Transactions on
Publisher
ieee
ISSN
0018-9464
Type
jour
DOI
10.1109/20.92106
Filename
92106
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