Title :
Measurements of frequency fluctuations in aluminum nitride contour-mode resonators
Author :
Miller, Nate ; Piazza, Gianluca
Author_Institution :
Dept. of Electr. & Comput. Eng., Carnegie Mellon Univ., Pittsburgh, PA, USA
Abstract :
As part of the current drive to engineer miniaturized monolithic high-performance microelectromechanical-enabled oscillators, there is a need for further study of frequency fluctuations in microelectromechanical resonators. To this end, we present the measurement of frequency fluctuations for 128 aluminum nitride contour-mode resonators. The measurements show that fluctuations are sufficiently large to play an important role in oscillator performance. These results were obtained for the first time from vector network analyzer measurements and are accompanied by an analysis of the experimental setup.
Keywords :
III-V semiconductors; frequency measurement; micromechanical resonators; network analysers; oscillators; wide band gap semiconductors; AlN; aluminum nitride contour-mode resonator; frequency fluctuation measurement; microelectromechanical resonator; miniaturized monolithic microelectromechanical-enabled oscillator; vector network analyzer; Frequency measurement; Noise measurement; Phase measurement; Phase noise; Resonant frequency;
Journal_Title :
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
DOI :
10.1109/TUFFC.2014.2987
