• DocumentCode
    1485902
  • Title

    Ion-implanted integrated optical waveguides in lithium niobate

  • Author

    Naden, J.M. ; Weiss, B.L.

  • Volume
    54
  • Issue
    5
  • fYear
    1984
  • fDate
    5/1/1984 12:00:00 AM
  • Firstpage
    227
  • Lastpage
    230
  • Abstract
    The role of ion implantation in the fabrication of optical waveguides in lithium niobate is describedtogether with a review of work carried out in this field. In addition the waveguide structure and the process parameters which determine its characteristics are outlined. Finally, the implications of this technology forthe fabrication of more complex integrated optical devices are discussed.
  • Keywords
    ferroelectric materials; integrated optics; ion implantation; optical waveguides; optical workshop techniques; LiNbO3; fabrication; ferroelectric material; integrated optical waveguides; ion implantation; process;
  • fLanguage
    English
  • Journal_Title
    Radio and Electronic Engineer
  • Publisher
    iet
  • ISSN
    0033-7722
  • Type

    jour

  • DOI
    10.1049/ree.1984.0056
  • Filename
    5269668
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1485902