Preparation of the alloy target for magneto-optical recording media

Author

Nate, T. ; Morimoto, T. ; Endoh, S. ; Oka, K.

Author_Institution

Sumitomo Metal Min., Chiba, Japan

Volume

24

Issue

6

fYear

1988

fDate

11/1/1988 12:00:00 AM

Firstpage

2443

Lastpage

2445

Abstract

A novel method of preparing rare-earth-transition metal (RE-TM) alloy targets suitable for use as magnetooptical media is developed. Three different targets are studied. One contains only alloy powders made by simultaneous reduction of and diffusion reactions between RE-oxide and TM powders (target A). The others contain alloy powders combined with both RE powders (target B) and alloy powders combined with both RE and TM powders (target C). Radial distributions of the film compositions on the disks are observed. Compositional variance of sputtered films prepared by targets that underwent long usage is also monitored. The compositional uniformity in the radial direction is superior for targets B and C. Target A, which has the lowest permeability among the three, exhibits better aging behaviour

Keywords

magnetic permeability; magnetic thin films; magneto-optical recording; rare earth alloys; sputter deposition; transition metal alloys; aging behaviour; alloy powders; compositional uniformity; diffusion reactions; film compositions; magneto-optical recording media; permeability; radial distributions; rare earth transition metal alloy targets; reduction; sputtered films; Aging; Glass; Magnetic analysis; Magnetic flux; Magnetooptic recording; Optical recording; Permeability; Powders; Sputtering; Substrates;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/20.92135

Filename

92135