Title :
Mechanical properties and wear characteristics of various thin films for rigid magnetic disks
Author :
Tsukamoto, Y. ; Yamaguchi, H. ; Yanagisawa, M.
Author_Institution :
NEC Corp., Kawasaki, Japan
fDate :
11/1/1988 12:00:00 AM
Abstract :
The relationships between mechanical properties and wear characteristics are described for carbon, SiO2 and CoNi-on-Cr thin films. The films are prepared on various rigid substrates in the submicron thickness range by RF magnetron sputtering. Mechanical properties examined include microhardness, Young´s modulus and internal stress. Wear resistances are evaluated for thin films sliding against a thin film head Al2O3-TiC slider. There is no correlation between the microhardness and the wear resistance. However, the load-indentation depth curves provide useful information, since the curve profile varies reflecting the presence of microdefects closely related to wear characteristics. A clear and common relationship holds between Young´s modulus and wear resistance which is a maximum at 0.8-0.9 times the modulus. The wear resistance of CoNi films decreases as the tensile stress increases in the Cr substrates. The properties of carbon films depend on their own internal stress; an increase in compression stress leads to deterioration in their wear resistance
Keywords :
Young´s modulus; carbon; chromium; cobalt alloys; dielectric thin films; hard discs; hardness; internal stresses; magnetic thin films; metallic thin films; nickel alloys; protective coatings; silicon compounds; sputtered coatings; thin films; wear; C thin film; CoNi-Cr; RF magnetron sputtering; SiO2; Young´s modulus; compression stress; hard discs; internal stress; load-indentation depth curves; mechanical properties; microdefects; microhardness; protective coatings; rigid magnetic disks; rigid substrates; submicron thickness range; tensile stress; thin film head Al2O3-TiC slider; thin films; wear characteristics; wear resistance; Argon; Internal stresses; Magnetic films; Magnetic heads; Magnetic materials; Magnetic recording; Mechanical factors; Sputtering; Substrates; Transistors;
Journal_Title :
Magnetics, IEEE Transactions on