Surface oxidation of CoCr evaporated films

Surface oxidization of evaporated CoCr thin films was carried out by annealing them in air to improve their durability. The scanning-electron-microscopy profile of the oxidized film surface was the same as that of the as-deposited film. The coefficient of kinetic friction was drastically decreased by oxidization, while the scratching durability increased. Auger electron spectroscopy and electron-spectroscopy chemical analysis showed that a 12-nm-thick oxidized surface layer contributed to the desirable properties of the film surface. The oxidized layer appeared to consist mainly of cobalt oxide, and chromium concentration decreased near the film surface. The treatment greatly improved medium durability in a configuration consisting of CoCr tapes and heads on a rotating cylinder