DocumentCode :
148712
Title :
Effect of surface damage on strength of silicon wafer for solar cells
Author :
Echizenya, Daisuke ; Sasaki, Kazuhiko
Author_Institution :
Adv. Tecnology R&D center, Mitsubishi Electr. Corp., Amagasaki, Japan
fYear :
2014
fDate :
23-25 April 2014
Firstpage :
14
Lastpage :
18
Abstract :
Recently, solar power generation using crystalline silicon wafers has been rapidly growing. It is well known that the mechanical properties of silicon wafers are affected by defects caused by slicing processes of the wafers. However the effect of the defects on the mechanical properties, especially, strength of the crystalline silicon wafers has not been clarified yet. In this paper, to clarify the effect of the defects during slicing process, bending tests are conducted using defects specimens. The specimens are given a defect by indentations referred to the slicing process of wafers. The two indentation loads are chosen to reveal the effect of the defects size on the bending strength. The bending strength is evaluated using based on fracture mechanics. The residual stress and the initial crack affect the bending strength; therefore, the residual stress and Raman spectrometry of the specimens are measured before the bending tests. Fracture surfaces are also observed by Transmission Electron Microscope (TEM). The experiments show that the bending strength depends on the defects size and that there are numerous cracks on the wafer surface caused by the slicing process. Finally, it is found that the minimizing of the mechanical surface defects on wafers gives the high reliability for photovoltaic modules and the increase in the wafer strength. Furthermore the residual stress and Raman spectrometry show that the difference of surface damage mode caused by the slicing processing method.
Keywords :
Raman spectra; bending; bending strength; cracks; elemental semiconductors; fracture mechanics; indentation; internal stresses; reliability; silicon; solar cells; solar power; transmission electron microscopy; Raman spectrometry; Si; TEM; bending strength; bending tests; crystalline silicon wafers; defects specimens; fracture mechanics; fracture surfaces; indentation load; initial crack; mechanical properties; mechanical surface defects; photovoltaic modules; reliability; residual stress; slicing process; solar cells; solar power generation; surface damage; transmission electron microscope; Crystals; Photovoltaic cells; Residual stresses; Silicon; Surface cracks; Surface treatment; failure analysis; mechanical design and reliability; thin films; wefer thinning;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Electronics Packaging (ICEP), 2014 International Conference on
Conference_Location :
Toyama
Print_ISBN :
978-4-904090-10-7
Type :
conf
DOI :
10.1109/ICEP.2014.6826653
Filename :
6826653
Link To Document :
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