Title :
Influence of target production techniques on target properties, sputtering process and thin films for magnetooptics
Author :
Schittny, S.U. ; Berchtold, L.A. ; Böhm, W. ; Schultheiss, E. ; Wirz, P.
Author_Institution :
Degussa AG, Hanau, West Germany
fDate :
11/1/1988 12:00:00 AM
Abstract :
Different production techniques for the fabrication of rare-earth/transition-metal sputtering targets based on FeCoGdTb and target tests for the preparation of magnetooptical thin films have been investigated. Correlations between target production techniques and resulting target properties as well as some effects on the thin films and the sputtering process are described
Keywords :
cadmium compounds; cobalt compounds; iron compounds; optical films; optical workshop techniques; sputter deposition; sputtered coatings; terbium compounds; FeCoGdTb; fabrication; magnetooptical thin films; rare-earth/transition-metal sputtering targets; sputtering process; target production techniques; target properties; Amorphous magnetic materials; Composite materials; Fabrication; Inorganic materials; Magnetic materials; Magnetic properties; Magnetooptic recording; Powders; Production; Sputtering;
Journal_Title :
Magnetics, IEEE Transactions on
