DocumentCode
1487286
Title
Spontaneous Formation of In-Whiskers on YIn
Thin Films Deposited by Combinatorial Magnetron Sputtering
Author
Takahashi, Tetsuya ; Abdulkadhim, Ahmed ; Music, Denis ; Schneider, Jochen M.
Author_Institution
Rheinisch-Westfalische Tech. Hochschule RWTH, Aachen Univ., Aachen, Germany
Volume
10
Issue
5
fYear
2011
Firstpage
1202
Lastpage
1208
Abstract
We demonstrate the spontaneous In-whisker formation from combinatorially sputtered YIn3 thin films. The morphology and extrusion kinetics of In-whiskers are affected by the local chemical composition. In-whiskers are extruded from the film surface upon exposure to atmosphere, but not in vacuum. Consequently, In-whisker growth is accompanied by an increase in oxygen content in the films. The results presented enable controlled processing of 1-D submicrometer/nanostructured materials with respect to morphology and growth kinetics.
Keywords
extrusion; indium alloys; metallic thin films; sputter deposition; surface morphology; whiskers (crystal); yttrium alloys; 1D nanostructured materials; 1D submicrometer materials; YIn3; combinatorial magnetron sputtering deposition; extrusion kinetics; indium-whisker formation; local chemical composition; oxygen content; surface morphology; thin films; Atmosphere; Atmospheric measurements; Compounds; Films; Morphology; Surface morphology; Surface treatment; Combinatorial sputtering; metal whisker; nanofabrication; oxidation;
fLanguage
English
Journal_Title
Nanotechnology, IEEE Transactions on
Publisher
ieee
ISSN
1536-125X
Type
jour
DOI
10.1109/TNANO.2011.2129527
Filename
5741854
Link To Document