Impact-type MEMS microrobot controlled by bare chip IC of hardware neuron

This paper reports the hexapod-type millimeter size microrobot, which is composed of a link mechanism and an impact drive mechanism actuator based on a piezoelectric device. Developed mechanism is composed of the multilayer piezoelectric element and the micro components fabricated by micro electro mechanical systems (MEMS) technology. The microrobot was able to walk like insects. Walking motion was realized by rotation of the actuator and link mechanisms. The rotational motion was generated by the impact head attached to the piezoelectric element. Walking pattern emulates an insect and the microrobot can walk on uneven surfaces. The size of mechanical system of microrobot was 4.0mm, 4.6mm and 3.6mm, width, length, and height in size, respectively. The rotational speed of the actuator was 60 rpm at square wave of 20V and frequency of 25 kHz. The battery was externally connected. In this study, the control system using an hardware neuron is made from analog electronic circuits that mimic the behavior of the biological neuron. This neuron could generate the driving waveforms of the actuator without using any software programs. In this research, we develop the hardware neuron by analog CMOS IC bare chip. This bare chip was wire bonded to the pad pattern of the peripheral circuit. The size of the circuit board with IC was 5.5mm, 6.0mm the width and the length in the size, respectively. The weight of the electrical system was 0.082g whereas that of the mechanical system was 0.047g. The control system could output the driving waveform to operate the walking motion.