Title :
Micro magnetic thin-film sensor using LC resonance
Author :
Takezawa, M. ; Kikuchi, N. ; Ishiyama, K. ; Yamaguchi, M. ; Arai, K.I.
Author_Institution :
Res. Inst. of Electr. Commun., Tohoku Univ., Sendai, Japan
fDate :
9/1/1997 12:00:00 AM
Abstract :
This paper reports the performance of a new micro magnetic thin-film magnetic field sensor which makes use of LC resonance of the sensor element as well as the impedance change due to the permeability change of the magnetic film. A large impedance change of 105% was achieved at a carrier frequency of 100 MHz. The large change was realized when the LC resonance frequency of the sensor element was lower than the frequency at which the eddy-current losses increased
Keywords :
equivalent circuits; magnetic field measurement; magnetic permeability; magnetic sensors; magnetic thin film devices; resonance; sensitivity; 100 MHz; LC resonance; impedance change; magnetic field sensor; micro magnetic thin-film; permeability change; Equivalent circuits; Frequency dependence; Impedance; Magnetic circuits; Magnetic fields; Magnetic films; Magnetic resonance; Magnetic sensors; Permeability; Resonant frequency; Thin film sensors;
Journal_Title :
Magnetics, IEEE Transactions on
