Title :
New three-dimensional memory array architecture for future ultrahigh-density DRAM
Author :
Endoh, Tetsuo ; Shinmei, Katsuhisa ; Sakuraba, Hiroshi ; Masuoka, Fujio
Author_Institution :
Res. Inst. of Electr. Commun., Tohoku Univ., Sendai, Japan
fDate :
4/1/1999 12:00:00 AM
Abstract :
In this paper, a three-dimensional (3-D) memory array architecture is proposed. This new architecture is realized by stacking several cells in series vertically on each cell located in a two-dimensional array matrix. Therefore, this memory array architecture has a conventional horizontal row and column address and new vertical row address. The total bit-line capacitance of this proposed architecture´s DRAM is suppressed to 37% of normal DRAM when one bit-line has 1-Kbit cells and the same design rules are used. Moreover, an array area of 1-Mbit DRAM using the proposed architecture is reduced to 11.5% of normal DRAM using the same design rules. This proposed architecture´s DRAM can realize small bit-line capacitance and small array area simultaneously. Therefore, this proposed 3-D memory array architecture is suitable for future ultrahigh-density DRAM
Keywords :
DRAM chips; ULSI; capacitance; cellular arrays; column address; horizontal row address; stacking; three-dimensional memory array architecture; two-dimensional array matrix; ultrahigh-density DRAM; vertical row address; Capacitance; Capacitors; Delay effects; Equivalent circuits; Memory architecture; Random access memory; Space technology; Stacking; Two dimensional displays;
Journal_Title :
Solid-State Circuits, IEEE Journal of