Title :
Measurement of residual stresses in a plate using a vibrational technique-application to electrolytic nickel coatings
Author :
Manceau, Jean-François ; Robert, Laurent ; Bastien, François O. ; Oytana, Claude ; Biwersi, Stephane
Author_Institution :
Lab. de Phys. et Metrol. des Oscillateurs, CNRS, Besancon, France
fDate :
12/1/1996 12:00:00 AM
Abstract :
A vibration method for the evaluation of the stress in a membrane is presented. The principle is based on the shift of the eigenfrequency of the modes due to the stress. The identification of the modes is obtained by an optical technique. The proposed method is applied to electrolytic nickel coatings. The results are compared with those obtained by X-ray analysis. The application of this type of measurement to other structures is discussed
Keywords :
electrodeposits; internal stresses; membranes; micromechanical devices; nickel; stress measurement; vibrations; Ni; eigenfrequency shift; electroformed material; electrolytic Ni coatings; membrane; modes identification; optical technique; plate; residual stresses; vibrational technique; Actuators; Biomembranes; Coatings; Helium; Integrated circuit measurements; Nickel; Optical sensors; Residual stresses; Stress measurement; Vibration measurement;
Journal_Title :
Microelectromechanical Systems, Journal of
