Ku Band High-Q Tunable Surface-Mounted Cavity Resonator Using RF MEMS Varactors

Author

Stefanini, Romain ; Martinez, Jorge D. ; Chatras, Matthieu ; Pothier, Arnaud ; Boria, Vicente E. ; Blondy, Pierre

Author_Institution

XLIM, Univ. de Limoges, Limoges, France

Volume

21

Issue

5

fYear

2011

fDate

5/1/2011 12:00:00 AM

Firstpage

237

Lastpage

239

Abstract

This paper presents a 14 GHz high-Q (quality factor) tunable resonator using microelectromechanical system (MEMS) varactors. A brass surface mountable cavity has been bonded on a fused silica wafer on which are processed three 1.1 mm long MEMS varactors. Their location has been optimized in order to obtain a wide frequency shift, when the cantilevers are actuated on the substrate. 15% tuning range from 11.9 GHz to 14.2 GHz has been obtained with a continuous shift from 11.9 GHz to 13.6 GHz. Measurements result in an average unloaded quality factor (Qu) of 480 over the operating frequency band.

Keywords

Q-factor; cantilevers; cavity resonators; micromechanical devices; varactors; RF MEMS varactors; brass surface mountable cavity; frequency 11.9 GHz to 14.2 GHz; frequency shift; fused silica wafer; high-Q tunable surface-mounted cavity resonator; quality factor; size 1.1 mm; tuning range; Capacitance; Cavity resonators; Metals; Micromechanical devices; Resonant frequency; Tuning; Varactors; Microelectromechanical system (MEMS) tunable resonators; RF-MEMS; microwave cavities;

fLanguage

English

Journal_Title

Microwave and Wireless Components Letters, IEEE

Publisher

ieee

ISSN

1531-1309

Type

jour

DOI

10.1109/LMWC.2011.2126565

Filename

5743031