Magnetic properties of sputtered bilayer and laminated CoZrRe/SiO 2 thin films

Multilayered CoZrRe/SiO₂ films have been investigated in an effort to increase permeability of soft amorphous CoZrRe films at high frequencies. The effects of SiO₂ layering on coercivity, anisotropy and permeability are presented. The magnetic characteristics are dependent on the deposition parameters and thickness of both the CoZrRe and the SiO₂ layers. CoZrRe films with SiO₂ overlayers exhibit greater resistance to annealing with increasing SiO ₂ input power. This is attributed to substrate heating with increasing input power that anneals the CoZrRe film during deposition. The coercivity of the multilayered films is less than that of a single CoZrRe layer. As the SiO₂ thickness increases, the coercivity of the multilayer film increases. These results are explained in terms of magnetostatic coupling between CoZrRe layers. Magnetooptic permeability measurements indicate good response at frequencies above 10 MHz for laminated films