DocumentCode :
1489943
Title :
Continuous monitoring in disk drive manufacturing
Author :
Query, Charles F.
Author_Institution :
Seagate Technol., San Jose, CA, USA
Volume :
35
Issue :
2
fYear :
1999
fDate :
3/1/1999 12:00:00 AM
Firstpage :
945
Lastpage :
949
Abstract :
This paper is addressed to the managers of clean rooms that are presently sampling with portable particle counters that are considering upgrading to Continuous Monitoring Systems. The intent is to provide a guide for the creation of in-house continuous monitoring procedures. The topics addressed will include: 1. The role of the system owner and system users; 2. The applicability of the two major types of systems: Manifold and Discrete; 3. The importance of sensor location; 4. Setting limits; 5. Interpreting the data, reports, etc.; 6. Corrective action checklist; 7. Some thoughts on justification, including system expansion and other sensor types
Keywords :
clean rooms; disc drives; monitoring; particle counting; clean room; continuous monitoring; disk drive manufacturing; portable particle counter; sampling; sensor; Asia; Computer aided manufacturing; Contamination; Counting circuits; Disk drives; Magnetic recording; Monitoring; Sampling methods; Sensor systems; Temperature sensors;
fLanguage :
English
Journal_Title :
Magnetics, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9464
Type :
jour
DOI :
10.1109/20.753813
Filename :
753813
Link To Document :
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