Electrostatic microactuator and design considerations for HDD applications

Author

Fan, L.-S. ; Hirano, T. ; Hong, J. ; Webb, P.R. ; Juan, W.H. ; Lee, W.Y. ; Chan, S. ; Semba, T. ; Imaino, W. ; Pan, T.S. ; Pattanaik, S. ; Lee, F.C. ; McFadyen, I. ; Arya, S. ; Wood, R.

Author_Institution

IBM Almaden Res. Center, San Jose, CA, USA

Volume

35

Issue

2

fYear

1999

fDate

3/1/1999 12:00:00 AM

Firstpage

1000

Lastpage

1005

Abstract

A flexure-based rotary electrostatic microactuator is described. This microactuator is for application in a high track-density hard disk drive (HDD). It is fabricated using a high aspect-ratio stencil electroplating process. This paper emphasizes the practical system-level issues that affect the device design. The micro-actuator is demonstrated in a 3.5" form-factor HDD. With a servo bandwidth of 5 kHz, a one-track seek can be completed in under 0.2 ms. This batch-fabricated electro-static microactuator provides a low-cost, high-performance solution for achieving very high track-densities

Keywords

disc drives; electroplating; electrostatic actuators; hard discs; 0.2 ms; 3.5 in; 5 kHz; batch fabrication; design; electrostatic microactuator; form factor; hard disk drive; stencil electroplating; track density; Actuators; Assembly; Bandwidth; Electrostatics; Fabrication; Hard disks; Magnetic heads; Microactuators; Micromechanical devices; Servomechanisms;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/20.753823

Filename

753823