Title :
A microactuator for head positioning system of hard disk drives
Author :
Fujita, Hiroyuki ; Suzuki, Kosei ; Ataka, Manabu ; Nakamura, Shigeo
Author_Institution :
Inst. of Ind. Sci., Tokyo Univ., Japan
fDate :
3/1/1999 12:00:00 AM
Abstract :
We proposed a new microactuator to realize high track density of Hard Disk Drives (HDDs). The proposed actuator is an electrostatic actuator with multiple parallel plate electrodes and it drives only a Read/Write (R/W) head element. The actuator is fabricated by micromachining technologies. We show the desired design parameters of actuators which will achieve 40 kilo track per inch (TPI). The required driving gap aspect ratio for a silicon actuator and a nickel actuator are 20 and 50 respectively. The aspect ratio of 20 for silicon will be realized by an Inductively Coupled Plasma (ICP) etching process and the aspect ratio of 50 for nickel will be fabricated by a novel electroforming process with vertical sacrificial layer
Keywords :
disc drives; electroforming; electrostatic actuators; hard discs; magnetic heads; micromachining; micropositioning; sputter etching; Ni; Si; aspect ratio; electroforming; electrostatic actuator; hard disk drive; head positioning system; inductively coupled plasma etching; microactuator; micromachining; multiple parallel plate electrodes; read/write element; sacrificial layer; track density; Electrodes; Electrostatic actuators; Frequency; Hard disks; Microactuators; Nickel; Open loop systems; Plasma applications; Servomechanisms; Silicon;
Journal_Title :
Magnetics, IEEE Transactions on
