Title :
A 2-DOF Electrostatically Actuated MEMS Nanopositioner for On-Chip AFM
Author :
Fowler, A.G. ; Laskovski, A.N. ; Hammond, A.C. ; Moheimani, S.O.R.
Author_Institution :
Sch. of Electr. Eng. & Comput. Sci., Univ. of Newcastle Australia, Callaghan, NSW, Australia
Abstract :
A new 2-DOF microelectromechanical systems (MEMS)-based parallel kinematic nanopositioner with electrostatic actuation is presented. The device has been designed, fabricated, and implemented using the silicon-on-insulator-based MEMSCAP SOIMUMPs process. Experimental characterization shows that in-plane displacements in excess of 15 μm are achievable and that the first resonant mode along each axis is located at approximately 820 Hz. The nanopositioner´s use in a practical application is demonstrated, with the device being used as the scanning stage during an atomic force microscope scan.
Keywords :
atomic force microscopy; electrostatic actuators; kinematics; microfabrication; nanofabrication; nanopositioning; silicon-on-insulator; 2DOF electrostatically actuated MEMS nanopositioner; MEMSCAP SOIMUMP process; atomic force microscope; first resonant mode; in-plane displacement; kinematic nanopositioner; microelectromechanical system; on-chip AFM; silicon-on-insulator; Actuators; Atomic force microscopy; Force; Nanopositioning; Scanning electron microscopy; Springs; Atomic force microscopy; electrostatic actuators; microelectromechanical systems (MEMS); nanopositioning;
Journal_Title :
Microelectromechanical Systems, Journal of
DOI :
10.1109/JMEMS.2012.2191940
