Title :
Mechanical Properties of Thin Free-Standing CYTOP Membranes
Author :
Fong, Norman R. ; Berini, Pierre ; Tait, R.Niall
Author_Institution :
Dept. of Electron., Carleton Univ., Ottawa, ON, Canada
fDate :
6/1/2010 12:00:00 AM
Abstract :
Mechanical bulge testing of thin free-standing CYTOP membranes for use with surface plasmon polariton (SPP) biosensors was conducted. Curve fitting of experimental data to a known deflection model allowed for the extraction of a Young´s modulus of 1.3 ?? 0.1 GPa and residual stress of 16.9 ?? 1.3 MPa. The fracture stress for the membranes was observed to be 96.9 ?? 8.4 MPa, which occurs at the membrane edges.
Keywords :
Young´s modulus; biosensors; curve fitting; fracture; internal stresses; membranes; polaritons; surface plasmons; Young´s modulus; curve fitting; deflection model; fracture stress; mechanical bulge testing; residual stress; surface plasmon polariton biosensors; thin free-standing CYTOP membranes; Bulge test; CYTOP Young´s modulus; CYTOP membrane; CYTOP residual stress; long-range surface plasmon polariton (LRSPP); surface plasmon biosensor;
Journal_Title :
Microelectromechanical Systems, Journal of
DOI :
10.1109/JMEMS.2010.2047633
