DocumentCode
1492738
Title
Mechanical Properties of Thin Free-Standing CYTOP Membranes
Author
Fong, Norman R. ; Berini, Pierre ; Tait, R.Niall
Author_Institution
Dept. of Electron., Carleton Univ., Ottawa, ON, Canada
Volume
19
Issue
3
fYear
2010
fDate
6/1/2010 12:00:00 AM
Firstpage
700
Lastpage
705
Abstract
Mechanical bulge testing of thin free-standing CYTOP membranes for use with surface plasmon polariton (SPP) biosensors was conducted. Curve fitting of experimental data to a known deflection model allowed for the extraction of a Young´s modulus of 1.3 ?? 0.1 GPa and residual stress of 16.9 ?? 1.3 MPa. The fracture stress for the membranes was observed to be 96.9 ?? 8.4 MPa, which occurs at the membrane edges.
Keywords
Young´s modulus; biosensors; curve fitting; fracture; internal stresses; membranes; polaritons; surface plasmons; Young´s modulus; curve fitting; deflection model; fracture stress; mechanical bulge testing; residual stress; surface plasmon polariton biosensors; thin free-standing CYTOP membranes; Bulge test; CYTOP Young´s modulus; CYTOP membrane; CYTOP residual stress; long-range surface plasmon polariton (LRSPP); surface plasmon biosensor;
fLanguage
English
Journal_Title
Microelectromechanical Systems, Journal of
Publisher
ieee
ISSN
1057-7157
Type
jour
DOI
10.1109/JMEMS.2010.2047633
Filename
5466041
Link To Document