Title :
Laser patterning of YBaCuO weak link bridges
Author :
Wiener-Avnear, E. ; Cooper, J.E. ; Kerber, G.L. ; Spargo, J.W. ; Toth, A.G. ; Josefowicz, J.Y. ; Rensch, D.B. ; Clemens, B.M. ; Hunter, A.T.
Author_Institution :
Hughes Microelectron. Center, Carlsbad, CA, USA
fDate :
3/1/1989 12:00:00 AM
Abstract :
A laser ablation process was developed to pattern thin-film superconducting devices with 1-μm resolution. The process was utilized to fabricate bridge structures in high Tc(>90 K) YBaCuO superconducting thin films sputtered on various substrates. For bridges patterned on thin films with a high degree of polycrystallinity, the authors observed weak-link Josephson behaviour, from 4.2 K up to Tc. The weak-link behaviour was attributed to grain-boundary superconducting tunneling. The results suggest that direct laser patterning can be a powerful technique for evaluation and optimization of prototype superconducting devices
Keywords :
Josephson effect; barium compounds; high-temperature superconductors; laser beam machining; sputtered coatings; superconducting junction devices; superconducting thin films; yttrium compounds; YBaCuO weak link bridges; grain-boundary superconducting tunneling; high temperature superconductor; laser ablation; laser patterning; polycrystallinity; sputtered films; superconducting thin films; thin-film superconducting devices; weak-link Josephson behaviour; Bridges; Laser ablation; Power lasers; Sputtering; Substrates; Superconducting devices; Superconducting thin films; Thin film devices; Tunneling; Yttrium barium copper oxide;
Journal_Title :
Magnetics, IEEE Transactions on
