Title :
Fiber optic photoluminescence setup for spatially resolved measurements
Author :
Banerjee, Sonali ; Zah, Chung-en ; Bhat, Rajaram ; Caneau, C.
Author_Institution :
Lucent Technol., Holmdel, NJ, USA
fDate :
2/1/1999 12:00:00 AM
Abstract :
Spatially resolved photoluminescence is used as a nondestructive tool to characterize semiconductor epitaxial wafers with a resolution better than the device dimensions. In this paper, we describe a novel photoluminescence measurement setup using fiber optic techniques for luminescence excitation and detection in a very simple confocal arrangement. A final spatial resolution as small as 5 μm±0.5 μm together with the compact design makes it very attractive
Keywords :
CCD image sensors; fibre optic sensors; nondestructive testing; optical testing; photoluminescence; semiconductor epitaxial layers; test equipment; alignment; compact design; confocal arrangement; fiber optic techniques; fibre optic photoluminescence; luminescence excitation; nondestructive tool; photoluminescence measurement; semiconductor epitaxial wafers; spatial resolution; spatially resolved measurements; Luminescence; Optical devices; Optical fibers; Optical filters; Optical materials; Photoluminescence; Quality control; Semiconductor materials; Spatial resolution; Stimulated emission;
Journal_Title :
Instrumentation and Measurement, IEEE Transactions on
