Fiber optic photoluminescence setup for spatially resolved measurements

Author

Banerjee, Sonali ; Zah, Chung-en ; Bhat, Rajaram ; Caneau, C.

Author_Institution

Lucent Technol., Holmdel, NJ, USA

Volume

48

Issue

1

fYear

1999

fDate

2/1/1999 12:00:00 AM

Firstpage

45

Lastpage

49

Abstract

Spatially resolved photoluminescence is used as a nondestructive tool to characterize semiconductor epitaxial wafers with a resolution better than the device dimensions. In this paper, we describe a novel photoluminescence measurement setup using fiber optic techniques for luminescence excitation and detection in a very simple confocal arrangement. A final spatial resolution as small as 5 μm±0.5 μm together with the compact design makes it very attractive

Keywords

CCD image sensors; fibre optic sensors; nondestructive testing; optical testing; photoluminescence; semiconductor epitaxial layers; test equipment; alignment; compact design; confocal arrangement; fiber optic techniques; fibre optic photoluminescence; luminescence excitation; nondestructive tool; photoluminescence measurement; semiconductor epitaxial wafers; spatial resolution; spatially resolved measurements; Luminescence; Optical devices; Optical fibers; Optical filters; Optical materials; Photoluminescence; Quality control; Semiconductor materials; Spatial resolution; Stimulated emission;

fLanguage

English

Journal_Title

Instrumentation and Measurement, IEEE Transactions on

Publisher

ieee

ISSN

0018-9456

Type

jour

DOI

10.1109/19.755058

Filename

755058