A novel air-bridge type gate-data line-crossover reducing signal delay for large-size TFT-LCD panel

A new gate-to-data line-crossover employing an air-bridge has been proposed and fabricated in order to reduce the line-crossing capacitance. The proposed structure is composed of a low-dielectric air-gap between the gate and data line-crossover while the conventional one employs an oxide as a dielectric material. The capacitance between the gate and data line in the TFT-LCD panel is decreased considerably due to the low-dielectric air-gap. The signal delay of the new panel structure is reduced by about ten times compared with that of the conventional panel. The mechanical stability of the new panel structure passivated with an oxide is comparable with the conventional one