Electro-mechanical coupling in shear-mode FBAR with piezoelectric modulated thin film

Author

Milyutin, Evgeny ; Muralt, Paul

Author_Institution

Lab. de Ceramique, Ecole Polytech. Fed. de Lausanne (EPFL), Lausanne, Switzerland

Volume

58

Issue

4

fYear

2011

fDate

4/1/2011 12:00:00 AM

Firstpage

685

Lastpage

688

Abstract

The electro-mechanical coupling and resonance characteristics of a piezoelectric modulated thin film bulk acoustic wave resonator (PMBAR) is described quantitatively. The derived 1-D analytical model is in agreement with 2-D finite element modeling (FEM). The modeling shows that a pure shear mode excitation can be achieved and that coupling of parasitic Lamb waves is reduced in this design.

Keywords

dielectric resonance; finite element analysis; piezoelectric thin films; piezoelectricity; surface acoustic wave resonators; surface acoustic waves; 1D analytical model; 2D finite element modeling; PMBAR; bulk acoustic wave resonator; electromechanical coupling; parasitic Lamb waves; piezoelectric modulated thin film; pure shear mode excitation; resonance characteristics; shear-mode FBAR; Analytical models; Couplings; Electric fields; Electrodes; Films; Finite element methods; Resonant frequency; Acoustics; Computer Simulation; Electrochemistry; Electrodes; Equipment Design; Finite Element Analysis; Membranes, Artificial; Micro-Electrical-Mechanical Systems; Transducers; Vibration;

fLanguage

English

Journal_Title

Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on

Publisher

ieee

ISSN

0885-3010

Type

jour

DOI

10.1109/TUFFC.2011.1860

Filename

5750089