A dynamic linearization concept for piezoelectric actuators

Author

Biancuzzi, Giovanni ; Haller, Daniel ; Lemke, Thomas ; Wischke, Martin ; Goldschmidtboeing, Frank ; Woias, Peter

Author_Institution

Dept. of Microsyst. Eng., Univ. of Freiburg, Freiburg im Breisgau, Germany

Volume

58

Issue

4

fYear

2011

fDate

4/1/2011 12:00:00 AM

Firstpage

689

Lastpage

697

Abstract

We present a linearization circuit based on a capacitive Wheatstone bridge that is able to set a desired polarization in a piezoactuator. The system is meant to be used for dynamic actuation in a broad frequency range. A general nonlinear model for piezoactuators is presented in which two nonlinear sub-systems are cascaded: the electric-field-to-polarization (E-P) and the polarization-to-strain (P-x) blocks. The inversion of the latter sub-system in combination with the linearization bridge results in a reduction of up to 19 dB of the harmonic distortion of the actuator´s mechanical displacement.

Keywords

harmonic distortion; piezoelectric actuators; capacitive Wheatstone bridge; dynamic linearization; electric-field-to-polarization; harmonic distortion; linearization circuit; nonlinear model; nonlinear subsystems; piezoelectric actuators; polarization-to-strain blocks; Actuators; Bridge circuits; Electric fields; Mathematical model; Piezoelectric polarization; Strain; Stress; Equipment Design; Equipment Failure Analysis; Micro-Electrical-Mechanical Systems; Nonlinear Dynamics; Transducers;

fLanguage

English

Journal_Title

Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on

Publisher

ieee

ISSN

0885-3010

Type

jour

DOI

10.1109/TUFFC.2011.1861

Filename

5750090