Title :
Self-assembled Ge/Si dots for faster field-effect transistors
Author :
Schmidt, Oliver G. ; Eberl, Karl
Author_Institution :
Max-Planck-Inst. fur Festkorperforschung, Stuttgart, Germany
fDate :
6/1/2001 12:00:00 AM
Abstract :
Self-assembled and coherently strained germanium nanostructured dots are grown on prepatterned Si substrates along ordered lines. These precisely aligned nanocrystals are proposed to make up the central unit of a dot-based field-effect transistor (DotFET). The strain-induced band edge splitting and the inherently smaller effective masses of charge carriers in Ge/Si dots promise faster transistors than are possible for conventional pure Si devices. Thick relaxed buffer layers-mandatory for any existing high-speed SiGe field-effect devices-are no longer required. The DotFET is straight-forward, defect-free, and fully compatible with current complementary metal-oxide-semiconductor (CMOS) technology
Keywords :
CMOS integrated circuits; Ge-Si alloys; MOSFET; nanotechnology; semiconductor materials; semiconductor quantum dots; CMOS; DotFET; GeSi; charge carriers; dot-based field-effect transistor; effective masses; nanostructured dots; ordered lines; strain-induced band edge splitting; CMOS technology; Capacitive sensors; Effective mass; FETs; Germanium silicon alloys; MOSFETs; Quantum dots; Self-assembly; Silicon germanium; US Department of Transportation;
Journal_Title :
Electron Devices, IEEE Transactions on