Title :
Drift-Free Micromirror Arrays Made of Monocrystalline Silicon for Adaptive Optics Applications
Author :
Lapisa, Martin ; Zimmer, Fabian ; Stemme, Göran ; Gehner, Andreas ; Niklaus, Frank
Author_Institution :
R. Inst. of Technol. (KTH), Stockholm, Sweden
Abstract :
In this paper, we report on the heterogeneous integration of monocrystalline silicon membranes for the fabrication of large segmented micromirror arrays for adaptive optics applications. The design relies on a one-level architecture with mirrors and suspension formed within the same material, employing a large actuator gap height of up to 5.1 μm to allow for a piston-type mirror deflection of up to 1600 nm. Choosing monocrystalline silicon as actuator and mirror material, we demonstrate a completely drift-free operation capability. Furthermore, we investigate stress effects that degrade the mirror topography, and we show that the stress originates from the donor silicon-on-insulator wafer. The novel heterogeneous integration strategy used in this work is capable of reducing this stress to a large extent.
Keywords :
adaptive optics; elemental semiconductors; integrated optics; micromirrors; optical fabrication; silicon; silicon-on-insulator; spatial light modulators; Si; actuator gap height; adaptive optics; donor silicon-on-insulator wafer; drift-free micromirror arrays; heterogeneous integration; mirror topography; monocrystalline silicon membranes; one-level architecture; piston-type mirror deflection; stress effects; stress reduction; CMOS integrated circuits; Fabrication; Micromirrors; Nickel; Polymers; Silicon; Heterogeneous integration; mirrors; silicon; spatial light modulators (SLMs); very large scale integration; wafer bonding; wafer-scale integration;
Journal_Title :
Microelectromechanical Systems, Journal of
DOI :
10.1109/JMEMS.2012.2190713
