Title :
GaAs-compatible surface-micromachined RF MEMS switches
Author :
Hyman, D. ; Schmitz, A. ; Warneke, B. ; Hsu, T.Y. ; Lam, J. ; Brown, J. ; Schaffner, J. ; Walston, A. ; Loo, R.Y. ; Tangonan, G.L. ; Mehregany, M. ; Lee, J.
Author_Institution :
HRL Labs., Malibu, CA, USA
fDate :
2/4/1999 12:00:00 AM
Abstract :
A MEMS switch has been developed for microwave applications. The switch has an actuation of 30 V, a response time of 20 μs, and mechanical robustness to withstand 109 actuations. An RF performance with >50 dB isolation below 2 GHz and <0.2 dB insertion loss from DC to 40 GHz has been measured
Keywords :
microactuators; micromachining; microwave switches; semiconductor switches; 0 to 40 GHz; 20 mus; 30 V; RF MEMS switches; actuation; insertion loss; isolation; mechanical robustness; microwave applications; response time; surface micromachining;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19990032
