Deposition of Zeolite Thin Layers Onto Silicon Wafers for Biomedical Use

The spin-coating of silicon wafers, (including integrated field-effect transistors) with nanoporous synthetic zeolite is herein described. The aim of this research is to investigate the feasibility of fabricating low noise ionoelectronic microsystems to acquire different biosignals, particularly the action potential generated by neurons. The proposed technique is fully compatible with standard integrated circuit technology. Results of scanning electron microscopy, microanalysis, and absorption process are discussed.