DocumentCode
1495571
Title
A thin-film waveguide photodetector using hydrogenated amorphous silicon
Author
Howerton, Marta McWright ; Batchman, Ted E.
Author_Institution
Dept. of Electr. Eng., Virginia Univ., Charlottesville, VA, USA
Volume
6
Issue
12
fYear
1988
fDate
12/1/1988 12:00:00 AM
Firstpage
1854
Lastpage
1860
Abstract
Metal-silicon-metal cladding layers on dielectric waveguides exhibit coupling and absorption characteristics that make them useful as photodetectors for integrated optical applications. Multilayer computer-modeling techniques were applied to waveguide photodetectors in order to investigate field and power distributions, as well as the attenuation and phase response in the guiding region. A waveguide photodetector based on amorphous silicon was fabricated and demonstrated
Keywords
dielectric waveguides; elemental semiconductors; integrated optics; metal-semiconductor-metal structures; photodetectors; silicon; absorption characteristics; amorphous Si; attenuation; dielectric waveguides; integrated optics; metal-insulator-metal cladding; multilayer computer-modeling; thin-film waveguide photodetector; Absorption; Amorphous materials; Application software; Dielectric thin films; Integrated optics; Optical attenuators; Optical coupling; Optical waveguides; Photodetectors; Transistors;
fLanguage
English
Journal_Title
Lightwave Technology, Journal of
Publisher
ieee
ISSN
0733-8724
Type
jour
DOI
10.1109/50.9255
Filename
9255
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