Title :
Stress sensing based on one dimensional photonic crystal nano beam
Author :
Fu-Li Hsiao ; Zhen-hong Yang
Author_Institution :
Inst. of Photonics, Nat. Changhua Univ. of Educ., Changhua, Taiwan
Abstract :
We demonstrate a one-dimensional photonic crystal nano beam. The structure is formed by silicon waveguide. A Si3N4 layer is deposited above the waveguide. The thermal stress between Si/Si3N4 induces the deformation of beam and affects the transmission peak of slow light mode. The thermal stress can be detected by measuring the shift of peaks in transmission spectrum.
Keywords :
nickel compounds; photonic crystals; silicon compounds; thermal stresses; waveguides; Si3N4; one-dimensional photonic crystal nano beam; silicon waveguide; stress sensing; thermal stress; Conferences; Decision support systems; Information processing; Intelligent sensors; photonic crystal; sensor; slow light; thermal stress; waveguide;
Conference_Titel :
Intelligent Sensors, Sensor Networks and Information Processing (ISSNIP), 2014 IEEE Ninth International Conference on
Conference_Location :
Singapore
Print_ISBN :
978-1-4799-2842-2
DOI :
10.1109/ISSNIP.2014.6827615
