DocumentCode
1496614
Title
Heterostructure barrier varactors on copper substrate
Author
Dillner, L. ; Stake, J. ; Kollberg, E.L.
Author_Institution
Dept. of Microelectron., Chalmers Univ. of Technol., Goteborg, Sweden
Volume
35
Issue
4
fYear
1999
fDate
2/18/1999 12:00:00 AM
Firstpage
339
Lastpage
341
Abstract
The authors demonstrate a fabrication process where heterostructure barrier varactor diodes are fabricated on a copper substrate which offers reduced parasitic losses and improved thermal conductivity. This has been achieved without degrading the electrical characteristics
Keywords
copper; losses; millimetre wave diodes; semiconductor technology; substrates; thermal conductivity; varactors; Cu; Cu substrate; fabrication process; heterostructure barrier varactors; parasitic losses reduction; thermal conductivity improvement;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:19990255
Filename
756735
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