DocumentCode
1496667
Title
An Investigation Into Electron Temperature, Number Density, and Optical Emission Spectroscopy of the DC Hollow-Cathode Plasma Discharge in
Author
Yousif, Farook Bashir ; Mondragon, Aidee Berenice
Author_Institution
Fac. de Cienc., Univ. Autonoma del Estado de Morelos, Cuernavaca, Mexico
Volume
40
Issue
6
fYear
2012
fDate
6/1/2012 12:00:00 AM
Firstpage
1715
Lastpage
1723
Abstract
In this paper, we measured the electron temperature and density of hollow-cathode plasma discharge as a function of discharge pressure and power in transition and collisional regions employing double-Langmuir-probe technique. Correction for the ion-current signal was made to compensate the reduction in the measured ion density due to high-pressure collisional processes within the sheath. The correction factor was found to increase from 9.94 to 48.23 as the pressure increased from 0.2 to 1.1 torr. Spectroscopic emission spectra were recorded, and the intensity of emission lines was investigated as a function of discharge power and pressure. The dominant dissociation fragments were found to be those of NO, , , and . An identification of the states leading to the observed emission lines and bands was made. Our results unambiguously show that the dissociation fragments and are mainly consumed in the production of NO. Effect of He gas on the discharge was found to be negligible.
Keywords
Langmuir probes; dissociation; plasma collision processes; plasma density; plasma temperature; spectroscopic light sources; DC hollow-cathode plasma discharge; He gas effect; N2O; NO production; collisional regions; correction factor; discharge power; discharge pressure; dissociation fragments; double-Langmuir probe technique; electron temperature; emission line intensity; high-pressure collisional processes; ion density measurement; ion-current signal; number density; optical emission spectroscopy; pressure 0.2 torr to 1.1 torr; sheath; spectroscopic emission spectra; Discharges; Neodymium; Plasma temperature; Probes; Temperature; Temperature measurement; Plasma diagnostics; plasma sheaths; plasma temperature;
fLanguage
English
Journal_Title
Plasma Science, IEEE Transactions on
Publisher
ieee
ISSN
0093-3813
Type
jour
DOI
10.1109/TPS.2012.2192453
Filename
6184323
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