Linearization of electrostatically actuated surface micromachined 2-D optical scanner

Author

Toshiyoshi, Hiroshi ; Piyawattanametha, Wibool ; Chan, Cheng-Ta ; Wu, Ming C.

Author_Institution

Dept. of Electr. Eng., California Univ., Los Angeles, CA, USA

Volume

10

Issue

2

fYear

2001

fDate

6/1/2001 12:00:00 AM

Firstpage

205

Lastpage

214

Abstract

This paper presents an effective method of linearizing the electrostatic transfer characteristics of micromachined two-dimensional (2-D) scanners. The orthogonal scan angles of surface micromachined polysilicon scanner are controlled by using quadrant electrodes for electrostatic actuation. By using a pair of differential voltages over a bias voltage, we could improve the distortion of projected images from 72% to only 13%. A theoretical model has been developed to predict the angle-voltage transfer characteristics of the 2-D scanner. The simulation results agree very well with experimental data. Differential voltage operation has been found to suppress the crosstalk of two orthogonal scan axes by both experiment and theoretically. We have found that a circular mirror is expected to have the lowest angular distortion compared with square mirrors. Perfect grid scanning pattern of small distortion (0.33%) has been successfully obtained by predistorting the driving voltages after calibration

Keywords

electrostatic actuators; linearisation techniques; micro-optics; micromachining; mirrors; optical scanners; 2D optical scanner; angle-voltage transfer characteristic; angular distortion; bias voltage; circular mirror; differential voltage operation; differential voltages; driving voltages; electrostatically actuated scanner; grid scanning pattern; linearization; orthogonal scan angles; orthogonal scan axes; quadrant electrodes; surface micromachining; transfer characteristics; Electrodes; Electrostatic actuators; Feedback control; Fiber lasers; Laser radar; Mirrors; Nonlinear distortion; Optical crosstalk; Optical distortion; Voltage;

fLanguage

English

Journal_Title

Microelectromechanical Systems, Journal of

Publisher

ieee

ISSN

1057-7157

Type

jour

DOI

10.1109/84.925744

Filename

925744