Title :
A novel 4 x 8 single-mode independently addressable oxide-isolated VCSEL array
Author :
Giaretta, Giorgio ; Li, M.Y. ; Li, Gabriel S. ; Yuen, Wupen ; Chang-Hasnain, Constance J.
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., California Univ., Berkeley, CA, USA
Abstract :
We report a novel process to fabricate single-mode independently addressable oxide-isolated vertical-cavity surface-emitting laser (VCSEL) arrays. The array is fabricated with a novel simple two-mask process where a single oxidation layer is used to define the laser aperture and to isolate the interconnects. The 4/spl times/8 VCSEL array has very uniform electrical, modal and geometrical characteristics that make it ideal for two-dimensional (2-D) array applications.
Keywords :
laser modes; masks; optical fabrication; optical interconnections; oxidation; quantum well lasers; semiconductor laser arrays; surface emitting lasers; 4 by 8 array; 4/spl times/8 single-mode independently addressable oxide-isolated VCSEL array; GaAs-AlAs; fabrication process; geometrical characteristics; interconnects; laser aperture; modal characteristics; simple two-mask process; single oxidation layer; two-dimensional array applications; vertical-cavity surface-emitting laser; very uniform electrical characteristics; Apertures; Application software; Optical arrays; Optical interconnections; Optical signal processing; Oxidation; Semiconductor laser arrays; Surface emitting lasers; Two dimensional displays; Vertical cavity surface emitting lasers;
Journal_Title :
Photonics Technology Letters, IEEE
