Long resonator micromachined tunable GaAs-AlAs Fabry-Perot filter

Author

Peerlings, J. ; Dehe, A. ; Vogt, A. ; Tilsch, M. ; Hebeler, C. ; Langenhan, F. ; Meissner, P. ; Hartnagel, H.L.

Author_Institution

Inst. fur Hochfrequenztech., Tech. Hochschule Darmstadt, Germany

Volume

9

Issue

9

fYear

1997

Firstpage

1235

Lastpage

1237

Abstract

We present novel concepts for tunable optical filters. Long resonant cavities of about 30-μm length have been realized with two-chip designs. GaAs technology has been applied to filters that are designed for the use in dense wavelength-division multiplexing (WDM) at wavelengths around 1550 nm. A finesse of 46.7, a full-width at half-maximum (FWHM) of 1.2 nm and electrostatic tuning over a range of 103 nm with an applied voltage of 35 V has been achieved. An alternative tuning concept that allows to tune the resonator length 4 μm by heating Ni-Cr resistors placed on the suspending beams of a membrane with an applied voltage of 2.7 V has been realized.

Keywords

Fabry-Perot resonators; III-V semiconductors; aluminium compounds; gallium arsenide; micromachining; micromechanical resonators; optical communication equipment; optical design techniques; optical fabrication; optical filters; tuning; wavelength division multiplexing; 1550 nm; 2.7 V; 30 mum; 4 mum; GaAs-AlAs; Ni-Cr; Ni-Cr resistors; WDM; alternative tuning concept; applied voltage; dense wavelength-division multiplexing; electrostatic tuning; full-width at half-maximum; integrated optics; long resonant cavities; long resonator micromachined tunable GaAs-AlAs Fabry-Perot filter; optical communication equipment; resonator length tuning; suspending beams; tunable optical filters; two-chip designs; Electrostatics; Fabry-Perot; Gallium arsenide; Heating; Optical filters; Optical resonators; Resonance; Resonator filters; Voltage; Wavelength division multiplexing;

fLanguage

English

Journal_Title

Photonics Technology Letters, IEEE

Publisher

ieee

ISSN

1041-1135

Type

jour

DOI

10.1109/68.618489

Filename

618489