Gigahertz Sandwich Strip Inductors Based on Fe-N Films: The Effect of Flux Closure at the Flange

Author

Gromov, A. ; Korenivski, V.

Author_Institution

R. Inst. of Technol., Stockholm, Sweden

Volume

46

Issue

6

fYear

2010

fDate

6/1/2010 12:00:00 AM

Firstpage

2097

Lastpage

2100

Abstract

Planar strip inductors consisting of soft Fe-N films enclosing a conductor made of Cu are fabricated on Si substrates and exhibit 70 to 100% inductance gain at 1 Ghz with quality factors of 3 to 5. The magnetic part of the inductance is less than predicted theoretically, which is attributed to hardening of the magnetic material at the edges of the strip, where the deposition is close to 60Â° incidence. Test films were fabricated on tilted substrates and found to develop very high anisotropy for deposition angles larger than 30Â°. Optimizing the flux closure at the strip edges is essential for further improving the performance of sandwich strip inductors.

Keywords

Q-factor; inductance; inductors; iron compounds; magnetic anisotropy; magnetic flux; magnetic thin films; soft magnetic materials; Fe-N; deposition angles; flux closure effect; gigahertz sandwich strip inductors; hardening; inductance gain; magnetic material; planar strip inductors; quality factor; soft films; tilted substrates; Conducting materials; Conductive films; Flanges; Inductance; Inductors; Magnetic anisotropy; Magnetic films; Q factor; Semiconductor films; Strips; Gigahertz inductors; magnetic multilayers;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/TMAG.2010.2044639

Filename

5467372