System Integration Challenges for a Slider With an Integrated Microactuator

To develop a system integration process for a slider with an integrated microactuator (SLIM), quite a few challenges had to be resolved. They include processes for double rowbar stacking and thinning, chiplet mounting, slider separation, and chiplet cross crown fabrication, to name just a few. The slider separation process is particularly challenging: during this process, the mounting bars suspended on thin Si leaf springs are released. This paper discusses the challenges encountered and the system integration solutions developed.