Batch-Fabricated Electrodynamic Microactuators With Integrated Micromagnets

Author

Wang, Naigang ; Arnold, David P.

Author_Institution

Interdiscipl. Microsyst. Group, Univ. of Florida, Gainesville, FL, USA

Volume

46

Issue

6

fYear

2010

fDate

6/1/2010 12:00:00 AM

Firstpage

1798

Lastpage

1801

Abstract

This paper reports the fabrication and characterization of two fully batch-fabricated electrodynamic microactuators. The actuators utilize wax-bonded Nd-Fe-B powder magnets and electroplated copper coils for electrodynamic actuation out of plane. A cantilever-type microactuator achieves a 2.66 Â¿m vertical deflection at a driving current of 5.5 mArms at 100 Hz. A piston-type actuator with elastomeric membrane obtained a 1.17 Â¿m vertical displacement at a driving current of 13.5 mArms at 100 Hz. These microactuators demonstrate the integrability of wax-bonded Nd-Fe-B powder magnets into microscale electromechanical transducers.

Keywords

boron alloys; iron alloys; microactuators; micromagnetics; neodymium alloys; permanent magnets; transducers; MEMS; batch-fabricated electrodynamic microactuators; elastomeric membrane; electrodynamic actuation; electroplated copper coils; integrated micromagnets; microelectromechanical systems; microscale electromechanical transducers; permanent magnets; Actuators; Biomembranes; Coils; Copper; Electrodynamics; Fabrication; Magnets; Microactuators; Powders; Transducers; Microactuators; Nd-Fe-B powder; microelectromechanical systems (MEMS); micromagnets; permanent magnets;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/TMAG.2010.2042428

Filename

5467402