Title :
Expressions for nonlinear effects of MEMS switch beam oscillations
Author :
Hallbjorner, P. ; Starski, J.P.
Author_Institution :
Ericsson Radar Electron. AB, Molndal
fDate :
5/24/2001 12:00:00 AM
Abstract :
MEMS switches with a beam that is free to move during RF signal transmission have nonlinear transfer functions, due to variations in the capacitance between the beam and the underlying transmission line. Expressions for the relative magnitude of modulation and intermodulation products are presented
Keywords :
capacitance; intermodulation; micromechanical devices; microwave switches; oscillations; transfer functions; MEMS switch beam oscillations; RF signal transmission; capacitance variation; intermodulation products; modulation; nonlinear effects; nonlinear transfer functions; transmission line;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:20010476
