DocumentCode :
1499384
Title :
Thickness and Temperature Effects on Magnetic Properties and Roughness of 
-Ordered FePt Films
Author :
Kim, Chang Soo ; Sapan, Jonathan J. ; Moyerman, Stephanie ; Lee, Kangho ; Fullerton, Eric E. ; Kryder, Mark H.
Author_Institution :
Data Storage Syst. Center, Carnegie Mellon Univ., Pittsburgh, PA, USA
Volume :
46
Issue :
6
fYear :
2010
fDate :
6/1/2010 12:00:00 AM
Firstpage :
2282
Lastpage :
2285
Abstract :
L10-ordered FePt films with strong perpendicular magnetic anisotropy have been successfully obtained using Ta and MgO seed layers deposited on thermally oxidized Si wafers. In this paper, we focused on examining the L10-crystalline ordering, surface roughness, and magnetic properties of the bottom FePt electrode in a perpendicular magnetic tunnel junction device. The influence of varying FePt thickness (2-18 nm) and deposition temperature (380-550°C) on the formation of L10-ordered FePt films has been studied. In order to investigate the FePt grain growth effects on the magnetic properties and the surface roughness, the morphology of L10-ordered FePt films was examined through transmission electron microscope plan-view images.
Keywords :
iron alloys; magnetic thin films; magnetic tunnelling; metallic thin films; oxidation; perpendicular magnetic anisotropy; platinum alloys; surface roughness; transmission electron microscopy; FePt; Si; crystalline ordering; deposition temperature; perpendicular magnetic anisotropy; perpendicular magnetic tunnel junction device; plan-view images; seed layers; surface roughness; thermal oxidation; thin films; transmission electron microscopy; Electrodes; Magnetic films; Magnetic properties; Magnetic tunneling; Perpendicular magnetic anisotropy; Rough surfaces; Semiconductor films; Surface morphology; Surface roughness; Temperature; ${rm L}1_{0}$ -ordered FePt; Ta and MgO seed layers; perpendicular magnetic tunnel junction; surface roughness;
fLanguage :
English
Journal_Title :
Magnetics, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9464
Type :
jour
DOI :
10.1109/TMAG.2010.2045485
Filename :
5467588
Link To Document :
