Title :
Implant-apertured and index-guided vertical-cavity surface-emitting lasers (I2-VCSELs)
Author :
Chirovsky, L.M.F. ; Hobson, W.S. ; Leibenguth, R.E. ; Hui, S.P. ; Lopata, J. ; Zydzik, G.J. ; Giaretta, G. ; Goossen, K.W. ; Wynn, J.D. ; Krishnmaoorthy, A.V. ; Tseng, B.J. ; Vandenberg, J.M. ; D´Asaro, L.A.
Author_Institution :
AT&T Bell Labs., Murray Hill, NJ, USA
fDate :
5/1/1999 12:00:00 AM
Abstract :
We have fabricated vertical-cavity surface-emitting lasers (VCSELs) which, for the first time, effectively combine a shallow ion implanted aperture, for current confinement under a thin highly conducting lateral current injection layer, and an independent index guide for optical beam confinement (I/sup 2/-VCSELs). Both features are possible only because they are made before a top dielectric mirror is deposited and patterned, and are photolithographically defined for improved size reproducibility compared to oxide-confined designs. The devices emit near 980 nm and have optical power outputs of 1 mW at 2.5-mA input. The 12-VCSEL design also easily incorporates coplanar contacts allowing us to operate flip-chip bonded I/sup 2/-VCSEL´s on silicon test chips at data rates of nearly 1 Gb/s.
Keywords :
flip-chip devices; ion implantation; laser transitions; mirrors; optical fabrication; photolithography; quantum well lasers; refractive index; surface emitting lasers; waveguide lasers; 1 Gbit/s; 1 mW; 2.5 mA; 980 nm; VCSEL; VCSEL design; coplanar contacts; current confinement; data rates; flip-chip bonded I/sup 2/-VCSEL; implant-apertured index-guided vertical-cavity surface-emitting lasers; improved size reproducibility; independent index guide; optical beam confinement; optical power outputs; oxide-confined designs; photolithographically defined; shallow ion implanted aperture; silicon test chips; thin highly conducting lateral current injection layer; top dielectric mirror; Apertures; Bonding; Dielectrics; Mirrors; Optical beams; Optical devices; Reproducibility of results; Stimulated emission; Surface emitting lasers; Vertical cavity surface emitting lasers;
Journal_Title :
Photonics Technology Letters, IEEE
