Monolithic integration of vertical-cavity surface-emitting laser and diffractive optical element for advanced beam shaping

Author

Martinsson, H. ; Bengtsson, J. ; Ghisoni, M. ; Larsson, A.

Author_Institution

Dept. of Microelectron., Chalmers Univ. of Technol., Goteborg, Sweden

Volume

11

Issue

5

fYear

1999

fDate

5/1/1999 12:00:00 AM

Firstpage

503

Lastpage

505

Abstract

We have demonstrated a vertical-cavity surface-emitting laser (VCSEL) with a monolithically integrated diffractive optical element (DOE) for advanced beam shaping. The DOE is a two-level surface relief, etched into the GaAs substrate beneath a bottom-emitting VCSEL. The combination generates a 4×4 array of focused spots 10 mm from the substrate with spot sizes down to less than 400 μm, almost at the diffraction limit. Diffraction efficiencies of 29% and uniformity errors of 14% were measured.

Keywords

diffractive optical elements; integrated optoelectronics; optical arrays; optical fabrication; optical focusing; quantum well lasers; surface emitting lasers; 29 percent; 400 mum; GaAs; VCSEL; advanced beam shaping; bottom-emitting VCSEL; diffraction efficiencies; diffraction limit; diffractive optical element; etching; focused spots; monolithic integration; two-level surface relief; uniformity errors; vertical-cavity surface-emitting laser; Integrated optics; Monolithic integrated circuits; Optical diffraction; Optical refraction; Optical sensors; Optical transmitters; Stimulated emission; Surface emitting lasers; US Department of Energy; Vertical cavity surface emitting lasers;

fLanguage

English

Journal_Title

Photonics Technology Letters, IEEE

Publisher

ieee

ISSN

1041-1135

Type

jour

DOI

10.1109/68.759379

Filename

759379