Title :
In situ growth of superconducting YBaCuO using reactive electron-beam coevaporation
Author :
Missert, N. ; Hammond, R. ; Mooij, J.E. ; Matijasevic, V. ; Rosenthal, P. ; Geballe, T.H. ; Kapitulnik, A. ; Beasley, M.R. ; Laderman, S.S. ; Lu, C. ; Garwin, E. ; Barton, R.
Author_Institution :
Dept. of Appl. Phys., Stanford Univ., CA, USA
fDate :
3/1/1989 12:00:00 AM
Abstract :
Conditions required for in situ growth of YBaCuO thin films by reactive electron-beam evaporation have been explored. Three sources of activated oxygen (atomic oxygen from microwave discharge, plasma generated by electron beams, and an ion beam) were compared. The best results so far were obtained with atomic oxygen. Epitaxial films with high critical currents were grown on SrTiO3 ⟨100⟩ and ⟨110⟩, Al2O3 ⟨1102⟩, and MgO ⟨100⟩ at 600°C. Evaporation rates were controlled with a rate monitor using atomic absorption
Keywords :
barium compounds; critical currents; electron beam deposition; epitaxial layers; high-temperature superconductors; superconducting thin films; vapour phase epitaxial growth; yttrium compounds; Al2O3; MgO; SrTiO3; atomic absorption; electron beam generated plasma; epitaxial films; evaporation rates; high critical currents; high temperature superconductors; in situ growth; ion beam generated plasma; microwave discharge; reactive electron-beam coevaporation; superconducting YBaCuO; thin films; Atomic beams; Atomic layer deposition; Electron beams; Fault location; Microwave generation; Plasma sources; Superconducting epitaxial layers; Superconducting microwave devices; Superconducting thin films; Yttrium barium copper oxide;
Journal_Title :
Magnetics, IEEE Transactions on
