DocumentCode
1500313
Title
Enhanced moisture protection of electronic devices by ultra-thin polyimide films
Author
Burack, John J. ; LeGrange, Jane D. ; Lin, A.W.
Author_Institution
AT&T Bell Lab., Princeton, NJ, USA
Volume
13
Issue
1
fYear
1990
fDate
3/1/1990 12:00:00 AM
Firstpage
214
Lastpage
218
Abstract
Thin films of polyimide which exhibit enhanced resistance to moisture have been fabricated using the Langmuir-Blodgett (LB) technique. LB films are ultrathin organic coatings of thicknesses ranging from tens of angstroms to a micrometer, characterized by high molecular density and a high degree of structural order. The adhesion strength of both LB and spin-coated films of several different polyimides, deposited on fused silica, has been measured by subjecting these films to steam or water, followed by a tape test, and monitoring changes in their UV spectra. The results demonstrate that LB films of polyimide adhere better to fused silica than the spin-coated films. In addition, measurements of water vapor transmission rate through Kapton sheet coated by a monolayer of any of the polyimides show that a monolayer forms a moisture barrier, decreasing the water vapor transmission through the Kapton. Based on these results, the electrical performance of polyimide films has been tested at 85°C, 85% humidity, by measuring leakage current between conducting paths under 180-V bias, on samples which are coated with various combinations of LB and spin-coated polyimide films. Composite films of polyimide consisting of an LB monolayer either underneath or on top of a thick, spin-coated film exhibit superior electrical performance to either a spin-coated or LB film by itself. This may be explained by the improved adhesion and/or decreased water permeability of polyimide LB films
Keywords
Langmuir-Blodgett films; adhesion; electronic conduction in insulating thin films; encapsulation; moisture; polymer films; protective coatings; ultraviolet spectra of organic molecules and substances; 180 V; 85 C; H2O vapor transmission rate; LB films; LB monolayer; Langmuir Blodgett films; SiO2; UV spectra; adhesion strength; electrical performance of polyimide films; enhanced moisture protection; enhanced resistance to moisture; fused silica; high degree of structural order; high molecular density; leakage current; moisture protection of electronic devices; monolayer moisture barrier; polyimide LB films; polyimides; spin-coated films; ultra-thin polyimide films; ultrathin organic coatings; water permeability; water vapor transmission rate; Adhesives; Coatings; Conductive films; Moisture; Monitoring; Polyimides; Protection; Silicon compounds; Testing; Transistors;
fLanguage
English
Journal_Title
Components, Hybrids, and Manufacturing Technology, IEEE Transactions on
Publisher
ieee
ISSN
0148-6411
Type
jour
DOI
10.1109/33.52873
Filename
52873
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