Fabrication and interface reaction of Y-Ba-Cu-O superconducting thin films by reactive ion beam coating

Author

Ren, C.X. ; Chen, G.L. ; Zheng, Y. ; Chen, J.M. ; Yang, J. ; Zhang, C.S. ; Xie, L.M. ; Zou, S.C.

Author_Institution

Ion Beam Lab., Shanghai Inst. of Metall., Acad. Sinica, China

Volume

25

Issue

2

fYear

1989

fDate

3/1/1989 12:00:00 AM

Firstpage

2463

Lastpage

2465

Abstract

Y-Ba-Cu-O superconducting thin films have been fabricated by the reactive ion beam coating technique with good reproducibility. The influence of atom stoichiometry on the critical temperatures of the films is determined. Ba and Cu atoms diffusing into substrates were detected by auger electron spectroscopy and Rutherford backscattering. A thin silver film deposited on ZrO₂ substrate as a buffer layer can effectively retard the interface reaction

Keywords

Auger effect; Rutherford backscattering; barium compounds; chemical interdiffusion; high-temperature superconductors; ion beam applications; stoichiometry; superconducting thin films; superconducting transition temperature; surface chemistry; vapour deposition; yttrium compounds; Ag; Rutherford backscattering; Y-Ba-Cu-O; ZrO₂ substrate; atom stoichiometry; auger electron spectroscopy; buffer layer; critical temperatures; diffusion; fabrication; high temperature superconductors; interface reaction; reactive ion beam coating; reproducibility; superconducting thin films; Atomic layer deposition; Coatings; Fabrication; Ion beams; Reproducibility of results; Substrates; Superconducting films; Superconducting thin films; Temperature; Yttrium barium copper oxide;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/20.92806

Filename

92806