RF magnetron sputtering of Bi-Sr-Ca-Cu-O thin films

Author

Kussmaul, A. ; Roesler, G.M., Jr. ; Tkaczyk, J.E. ; Moodera, J.S. ; Hao, X. ; Gibson, G.A. ; Meservey, R. ; Tedrow, P.M.

Author_Institution

Francis Bitter Nat. Magnet Lab., MIT, Cambridge, MA, USA

Volume

25

Issue

2

fYear

1989

fDate

3/1/1989 12:00:00 AM

Firstpage

2553

Lastpage

2555

Abstract

Thin films of the high-T_c material Bi-Sr-Ca-Cu-O were prepared by the RF-magnetron technique from a single reacted and sintered target in pure argon atmosphere on sapphire substrates. The samples were annealed for three minutes in pure oxygen at 810°C. Their composition was studied by Rutherford backscattering. The superconducting transition was very broad, with R=O at 65 K for the best film. MgO substrates and nonsintered targets were also used. The behavior of the resistance in a magnetic field (up to 20 T) was studied

Keywords

Rutherford backscattering; bismuth compounds; calcium compounds; high-temperature superconductors; sputter deposition; strontium compounds; superconducting thin films; superconducting transition temperature; 65 K; 810 degC; Al₂O₃; Ar atmosphere; Bi-Sr-Ca-Cu-O thin films; MgO; RF magnetron sputtering; Rutherford backscattering; annealing; composition; high temperature superconductivity; nonsintered targets; sapphire substrates; sintered target; superconducting transition; Annealing; Argon; Atmosphere; Magnetic materials; Radio frequency; Sputtering; Substrates; Superconducting films; Superconducting magnets; Superconducting materials;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/20.92826

Filename

92826