Title :
RF magnetron sputtering of Bi-Sr-Ca-Cu-O thin films
Author :
Kussmaul, A. ; Roesler, G.M., Jr. ; Tkaczyk, J.E. ; Moodera, J.S. ; Hao, X. ; Gibson, G.A. ; Meservey, R. ; Tedrow, P.M.
Author_Institution :
Francis Bitter Nat. Magnet Lab., MIT, Cambridge, MA, USA
fDate :
3/1/1989 12:00:00 AM
Abstract :
Thin films of the high-Tc material Bi-Sr-Ca-Cu-O were prepared by the RF-magnetron technique from a single reacted and sintered target in pure argon atmosphere on sapphire substrates. The samples were annealed for three minutes in pure oxygen at 810°C. Their composition was studied by Rutherford backscattering. The superconducting transition was very broad, with R=O at 65 K for the best film. MgO substrates and nonsintered targets were also used. The behavior of the resistance in a magnetic field (up to 20 T) was studied
Keywords :
Rutherford backscattering; bismuth compounds; calcium compounds; high-temperature superconductors; sputter deposition; strontium compounds; superconducting thin films; superconducting transition temperature; 65 K; 810 degC; Al2O3; Ar atmosphere; Bi-Sr-Ca-Cu-O thin films; MgO; RF magnetron sputtering; Rutherford backscattering; annealing; composition; high temperature superconductivity; nonsintered targets; sapphire substrates; sintered target; superconducting transition; Annealing; Argon; Atmosphere; Magnetic materials; Radio frequency; Sputtering; Substrates; Superconducting films; Superconducting magnets; Superconducting materials;
Journal_Title :
Magnetics, IEEE Transactions on
