Title :
Stochastic Modeling of the Pull-In Voltage in a MEMS Beam Structure
Author :
Boloni, Francisc Attila ; Benabou, Abdelkader ; Tounzi, Abdelmounaïm
Author_Institution :
Univ. Lille Nord de France, Lille, France
fDate :
5/1/2011 12:00:00 AM
Abstract :
This paper deals with a stochastic approach to model the pull-in voltage in a microelectromechanical system (MEMS) beam structure. Two nonintrusive stochastic techniques are used: a sampling method, based on Monte-Carlo simulations and a polynomial chaos expansion (PCE) approach. The deterministic model solves an electro-mechanical problem using a coupled 2-D finite element (FE) electrostatic and Euler-Bernoulli beam equation mechanical model. The influence on the pull-in voltage of three parameters subjected to uncertainty (material properties and shape) was investigated. Also, the advantage of the PCE method, compared to Monte-Carlo sampling method, was emphasized.
Keywords :
Monte Carlo methods; finite element analysis; micromechanical devices; polynomials; sampling methods; stochastic processes; 2D finite element electrostatic model; Euler-Bernoulli beam equation mechanical model; MEMS beam structure; Monte-Carlo sampling method; Monte-Carlo simulation; deterministic model; microelectromechanical system beam structure; nonintrusive stochastic techniques; polynomial chaos expansion approach; pull-in voltage; stochastic modeling; Computational modeling; Electrostatics; Force; Mathematical model; Micromechanical devices; Polynomials; Stochastic processes; Microelectromechanical system (MEMS); Monte-Carlo; polynomial chaos expansion (PCE); pull-in; stochastic;
Journal_Title :
Magnetics, IEEE Transactions on
DOI :
10.1109/TMAG.2010.2081355
